- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/317 - Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation
Patent holdings for IPC class H01J 37/317
Total number of patents in this class: 2636
10-year publication summary
|
294
|
226
|
209
|
185
|
205
|
219
|
162
|
161
|
172
|
53
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Varian Semiconductor Equipment Associates, Inc. | 1282 |
326 |
| NuFlare Technology, Inc. | 770 |
288 |
| Axcelis Technologies, Inc. | 429 |
250 |
| Applied Materials, Inc. | 16587 |
177 |
| ASML Netherlands B.V. | 6816 |
159 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
105 |
| Mapper Lithography IP B.V. | 136 |
81 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 96 |
79 |
| Entegris, Inc. | 1736 |
47 |
| Hitachi High-Technologies Corporation | 2034 |
37 |
| D2s, Inc. | 150 |
33 |
| FEI Company | 851 |
27 |
| Advanced ION Beam Technology, Inc. | 72 |
26 |
| Nissin ION Equipment Co., Ltd. | 78 |
26 |
| Hitachi High-Tech Science Corporation | 326 |
24 |
| IMS Nanofabrication GmbH | 56 |
24 |
| mi2-factory GmbH | 30 |
24 |
| Xyleco, Inc. | 217 |
22 |
| Hitachi High-Tech Corporation | 4424 |
22 |
| Praxair Technology, Inc. | 1367 |
21 |
| Other owners | 838 |